2003 International Technology Roadmap for Semiconductors (ITRS)

Executive Summary

Overall Roadmap Technology Characteristics

Assembly and Packaging

Design

Emerging Research Devices

Environment, Safety, and Health

Factory Integration

Front End Processes

Interconnect

Lithography

Metrology

Modeling and Simulation

Process Integration, Devices, and Structures (PIDS)

Radio Frequency and Analog/Mixed-Signal Technologies (RFAMS) for Wireless Communications

System Drivers

Test and Test Equipment

Yield Enhancement