This white paper discusses known uses of PFAS-containing articles, specific performance requirements driving their use, and potential alternatives. We will provide examples of the use of fluoropolymers in equipment and facility systems that facilitate the manufacture of integrated circuits (ICs), and how the unique properties of PFAS-containing polymers enable the semiconductor manufacturing process. We will also discuss currently unidentified but reasonably foreseeable uses of fluoropolymer articles; the underlying reasons hindering identification; and the measures for identifying, reporting and substituting such articles. 

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PFAS-Containing Articles Used in Semiconductor Manufacturing