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Semiconductor PFAS Consortium

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Semiconductor PFAS Consortium

The Semiconductor PFAS Consortium is an international group formed to collect the technical data needed to formulate an industry-wide approach and better inform public policy and legislation regarding the semiconductor industry’s use of per- and poly-fluorinated alkyl substances (PFAS).

The consortium includes technical working groups, each focused on:

  • Identification of PFAS uses, why they are used, and viability of alternatives,
  • Application of the pollution prevention hierarchy to, where possible: reduce PFAS consumption or eliminate use, identify alternatives, and minimize and control emissions,
  • Development of socioeconomic impact analysis data, and
  • Identification of research needs.

The consortium membership is comprised of semiconductor manufacturers and members of the supply chain including chemical, material, and equipment suppliers. For more information, contact the PFAS Consortium at

The essential use of fluorochemicals in lithographic patterning and semiconductor processing >