2015 International Technology Roadmap for Semiconductors (ITRS)

Published on Friday, Jun 05, 2015
by Semiconductor Industry Association

Executive Report

Section 1: System Integration

Section 2: Heterogeneous Integration

Section 3: Heterogeneous Components

Section 4: Outside System Connectivity

Section 5: More Moore

Section 6: Beyond CMOS

Section 7: Factory Integration

2015 ITRS ITWGs

  1. Test
  2. Lithography
  3. Metrology
  4. ERM
  5. ESH
  6. Yield Enhancement
  7. Interconnect